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MEMS pressure sensor array static pressure test. (a) Schematic diagram ...
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MEMS Pressure Sensor – Electricity …
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Details of developed sensor array: (a) 8 ch-MEMS array, (…
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Detail of 7-element MEMS sensor array with 2-mm spaci…
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(a) 3D design of the tactile sensor array. (b) Top: the 2 × 2 MEMS ...
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Mechanical configuration of micro-electro-mechanical systems (MEMS ...
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2 Concept of an integrated multi-analyte MEMS sensor array for i…

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